该论文中描述的步骤是正确的。在arm64架构下实现单步追踪需要用到ptrace系统调用，并设置PTRACE_SINGLESTEP选项。以下为代码示例：

#include 
#include 
#include 
#include 

int main()
{
    pid_t child_pid;
    long orig_r0;

    child_pid = fork();
    if (child_pid == 0) {
        // 子进程
        ptrace(PTRACE_TRACEME, 0, NULL, NULL);
        execl("/bin/ls", "ls", NULL);
    } else {
        // 父进程
        wait(NULL);
        // 设置单步追踪
        ptrace(PTRACE_SETOPTIONS, child_pid, 0, PTRACE_O_EXITKILL | PTRACE_O_TRACEEXEC | PTRACE_O_TRACECLONE | PTRACE_O_TRACEFORK | PTRACE_O_TRACEVFORK | PTRACE_O_TRACESECCOMP | PTRACE_O_TRACEEXIT | PTRACE_O_TRACEVFORKDONE | PTRACE_O_TRACESYSCALL | PTRACE_O_MASK) == -1);
        
        // 执行单步追踪
        while(1) {
            ptrace(PTRACE_SINGLESTEP, child_pid, NULL, NULL);
            waitpid(child_pid, NULL, 0);
            orig_r0 = ptrace(PTRACE_PEEKUSER, child_pid, 8 * REG_R0, NULL);
            printf("Child executed a system call! Orig_r0 = %ld\n", orig_r0);
            if (orig_r0 == __NR_exit)
                break;
        }
    }
    return 0;
}